Electrostatic Chuck (ESC)

Trek amplifiers (e.g. Trek 645, Trek 646) are used to apply AC and DC voltages to the electrode(s) of coloumbic or Johnsen-Rahbek electrostatic chucks which are used to clamp semiconductor wafers or flat panel displays during device processing and handling operations.
Trek 646 Electrostatic Chuck Supply (ESC)

Trek 646 Electrostatic Chuck Supply (ESC)

Trek 645 Electrostatic Chuck Supply (ESC)

Trek 645 Electrostatic Chuck Supply (ESC)